Page 47 - Demo

2025%u5e745-6%u6708 | www.eettaiwan.comDESIGN CORNER 45%u57161%uff1a3D IC%u7684%u7bc4%u4f8b%u3002%u57162%uff1a%u7d93%u904e30%u5206%u9418%u9375%u5408%u5f8c%u7684%u9285%u5c0d%u9285%u9375%u5408%u5c64%u5f71%u50cf%u3002%u524d%uff0c%u6700%u65e9%u76843D IC%u6574%u5408%u6280%u8853%u7531%u9285%u5c0d%u9285%u9375%u5408%u6280%u8853%u6240%u958b%u59cb%u7684%u30021999~2002%u5e74%u9593%uff0c%u9ebb%u7701%u7406%u5de5%u5b78%u9662(MIT)%u7684Reif%u7814%u7a76%u5718%u968a%u63d0%u51fa%u4e86%u4e00%u7a2e%u6676%u5713%u7d1a3D%u6574%u5408%u65b9%u6848%uff0c%u5176%u4e2d%u5305%u62ec%u4f7f%u7528%u8f09%u9ad4%u6676%u5713(Si carrier)%u3001%u7814%u78e8%u6280%u8853(Thinning Technology)%uff0c%u4ee5%u53ca%u9285%u5c0d%u9285%u76f4%u63a5%u9375%u5408%uff0c%u5982%u57161%u6240%u793a%u3002%u70ba%u4e86%u907f%u514d%u5c0d%u6676%u5713%u5167%u7684%u5143%u4ef6%u9020%u6210%u71b1%u640d%u50b7%uff0c%u9285%u5c0d%u9285%u9375%u5408%u7684%u6700%u9ad8%u6eab%u5ea6%u88ab%u9650%u5236%u5728400%u2103%uff0c%u4ee5%u7b26%u5408CMOS%u88fd%u7a0b%u7684%u71b1%u9810%u7b97%u30022001%u5e74%uff0c%u9673%u51a0%u80fd%u6559%u6388%u5728Reif%u5718%u968a%u4e2d%u8b49%u660e%u4e86%u9285%u5c0d%u9285%u9375%u5408%u53ef%u5728400%u2103%u4e0b%u6210%u529f%u9032%u884c%uff0c%u4e26%u4e14%u5176%u9375%u5408%u4ecb%u9762%u5b8c%u5168%u6d88%u5931%uff0c%u8b49%u660e%u4e86%u8a72%u6280%u8853%u7684%u53ef%u884c%u6027%u3002%u5982%u57162%u6240%u793a%uff0c%u5176%u71b1%u58d3%u9375%u5408%u689d%u4ef6%u70ba400%u2103%u548c400mbar%uff0c%u6301%u7e8c30%u5206%u9418%uff0c%u4e4b%u5f8c%u5728%u6c2e%u6c23(N2)%u74b0%u5883%u4e0b%u4ee5400%u2103%u9032%u884c30%u5206%u9418%u7684%u9000%u706b%u3002%u800c%u6b64400%u2103%u7684%u9375%u5408%u6eab%u5ea6%u5f8c%u4f86%u6301%u7e8c%u61c9%u7528%u65bc%u63a5%u7e8c%u767c%u5c55%u7684%u6df7%u5408%u9375%u5408%u88fd%u7a0b%u30022000~2005%u5e74%u9593%uff0c%u9673%u51a0%u80fd%u6559%u6388%u767c%u8868%u4e86%u5927%u91cf%u95dc%u65bc%u9285%u5c0d%u9285%u9375%u5408%u7684%u7814%u7a76%uff0c%u5305%u62ec%u5f62%u614b%u6f14%u8b8a%u3001%u9375%u5408%u5f37%u5ea6%u3001%u9375%u5408%u53c3%u6578%u6e96%u5247%u4ee5%u53ca%u96fb%u6027%u7279%u6027%u3002%u6e2c%u8a66%u7d50%u679c%u986f%u793a%uff0c%u826f%u597d%u7684%u9285%u5c0d%u9285%u9375%u5408%u7d50%u69cb%u7684%u5e73%u5747%u63a5%u89f8%u96fb%u963b%u7d04%u70ba1%u00d710-8 %u03a9-cm%u00b2%uff0c%u6700%u4f4e%u53ef%u9054%u52301.2%u00d710-9 %u03a9-cm%u00b2%u30022006%u5e74%uff0c%u9673%u51a0%u80fd%u6559%u6388%u5728IBM%u5de5%u4f5c%u671f%u9593%uff0c%u9032%u4e00%u6b65%u65bc%u570b%u969b%u534a%u5c0e%u9ad4%u91cd%u8981%u6703%u8b70IEDM%u767c%u8868%u4e86%u95dc%u65bc%u9285%u5c0d%u9285%u9375%u5408%u7684%u7d9c%u5408%u7814%u7a76%uff0c%u6db5%u84cb%u4e86%u7d50%u69cb%u8a2d%u8a08%u548c%u5716%u6848%u8003%u91cf%u3002%u4f46%u5728%u539f%u59cb%u7684%u9285%u5c0d%u9285%u9375%u5408%u65b9%u6848%u4e2d%uff0c%u9285%u5468%u570d%u4e26%u7121%u5176%u4ed6%u6750%u6599%uff0c%u6709%u53ef%u80fd%u5c0e%u81f4%u6f5b%u5728%u7684%u53ef%u9760%u6027%u554f%u984c%uff0c%u4f8b%u5982%u9285%u8150%u8755%u6216%u662f%u6574%u9ad4%u9375%u5408%u5f37%u5ea6%u4e0d%u8db3%u3002%u96d6%u7136%u9019%u4e9b%u554f%u984c%u53ef%u4ee5%u4f7f%u7528%u5e95%u90e8%u586b%u5145%u81a0%u4f86%u586b%u88dc%u9285%u9375%u5408%u4ecb%u9762%u7684%u9593%u9699%uff0c%u4f46%u7531%u65bc%u9285%u588a%u7684%u9ad8%u5ea6%u50c5%u70ba%u5e7e%u5fae%u7c73%uff0c%u6b64%u65b9%u6cd5%u6975%u5177%u6311%u6230%u6027%u3002%u6b64%u5916%uff0c%u5e95%u90e8%u586b%u5145%u81a0%u7684%u65b9%u6cd5%u50c5%u9069%u7528%u65bc%u6676%u7247%u7d1a%u9375%u5408%uff0c%u800c%u4e0d%u9069%u7528%u65bc%u6676%u5713%u7d1a%u9375%u5408%u3002%u70ba%u4e86%u89e3 %u6c7a %u9019 %u4e9b %u554f %u984c%uff0c%u7814 %u7a76 %u4eba%u54e1%u63d0%u51fa%u4e86%u4e00%u7a2e%u76f4%u89ba%u6027%u7684%u89e3%u6c7a%u65b9%u6848%uff0c%u5373%u5728%u9285%u5c0d%u9285%u9375%u5408%u524d%u52a0%u5165%u5468%u570d%u7684%u4ecb%u96fb%u6750%u6599%u3002%u9069%u7576%u7684%u4ecb%u96fb%u6750%u6599%u5305%u62ec%u4e8c%u6c27%u5316%u77fd(SiO2)%u6216%u9ad8%u5206%u5b50%u6750%u6599%u3002%u7406%u60f3%u7684%u9375%u5408%u60c5%u5883%u662f%u540c%u6642%u5be6%u73fe%u9285%u5c0d%u9285%u8207%u4ecb%u96fb %u6750%u6599%u5c0d%u4ecb %u96fb %u6750%u6599%u7684 %u9375%u5408%u300220 0 5%u5e74%uff0cRPI%u7684Gut mann%u8207Lu%u5718%u968a%u6210%u529f%u5c55%u793a%u4e8620 0mm%u6676%u5713%u7d1aCu/BCB (benzocyclobutene)%u71b1%u58d3%u9375%u5408%u6280%u8853%uff0c%u4f7f%u752810,000 N%u7684%u58d3%u529b%uff0c%u5728250%u2103%u4e0b%u9032%u884c30%u5206%u9418%uff0c%u96a8%u5f8c%u5347%u6eab%u81f3350%u2103%u518d%u6301%u7e8c30%u5206%u9418%uff0c%u5982%u57163%u6240%u793a%u3002%u8a72%u6280%u8853%u5728%u540c%u5e74%u88ab%u6b63%u5f0f%u547d%u540d%u70ba%u300c%u6df7%u5408%u9375%u5408%u300d%uff0c%u81ea%u6b64%uff0c%u7814%u7a76%u4eba%u54e1%u958b%u59cb%u767c%u5c55%u57fa%u65bcCu/Polymer (%u805a%u5408%u7269)%u548cCu/SiO2%u7d50%u69cb%u7684%u7406%u60f3%u6df7%u5408%u9375%u5408%u6280%u8853%u3002%u70ba%u4e86%u5229%u7528%u805a%u5408%u7269%u7684%u9806%u61c9%u6027(compliance)%uff0cIBM%u79d1%u5b78%u5bb6%u958b%u767c%u4e86%u4e00%u7a2e%u300c%u9396%u8207%u9470%u300d(Lock-andKey)%u6df7%u5408%u9375%u5408%u7d50%u69cb%uff0c%u5176%u4e2d%u9802%u5c64%u6676%u5713%u7684%u9285%u588a/%u9285%u67f1%u7d50%u69cb%u5145%u7576%u300c%u9396%u300d%uff0c%u800c%u5e95%u5c64%u6676%u5713%u4e0a%u7684%u805a%u5408%u7269(%u5982%u805a%u91af%u4e9e%u80fa)%u5247%u5177%u6709%u8f03%u5927%u5b54%u6d1e%uff0c%u5145%u7576%u300c%u9470%u5319%u300d%uff0c%u4ee5%u5bb9%u7d0d%u9285%u588a/%u9285%u67f1%u72c0%u7d50%u69cb%u3002%u5982%u57164%u6240%u793a%uff0c%u8a72300mm%u6676%u5713%u7d1a%u9375%u5408%u65b9%u6848%u5df2%u6210%u529f%u5c55%u793a%uff0c%u4e26%u4e14%u5229%u7528%u93a2%u7a7f%u77fd%u901a%u5b54(W TSV)%u5c07%u9375%u5408%u8207%u7814%u78e8%u5f8c%u7684%u6676%u5713%u5c0e%u901a%u81f3%u5916%u90e8%u3002%u57fa%u65bcIBM%u7684%u7814%u7a76%u7d93%u9a57%u8207%u6210%u679c%uff0c%u9673%u51a0%u80fd%u6559%u6388%u5728%u52a0%u5165%u967d%u660e%u4ea4%u901a%u5927%u5b78%u5f8c%u57163%uff1aCu/BCB%u6df7%u5408%u9375%u5408%u7684%u9996%u6b21%u5c55%u793a%u3002%u57164%uff1a%u63a1%u7528Lock-n-Key%u6280%u8853%u7684Cu/Polymer%u6df7%u5408%u9375%u5408%u5c55%u793a%u3002