Page 49 - Demo

2025%u5e745-6%u6708 | www.eettaiwan.comDESIGN CORNER 47%u57169%uff1a400nm%u9593%u8ddd%u6df7%u5408%u9375%u5408%u4e92%u9023%u3002%u4f86%u5be6%u73fe%u9ad8%u5bc6%u5ea6%u4e92%u9023%u7684%u53ef%u80fd%u6027%u3002%u7531 %u65bc %u9375 %u5408 %u6eab %u5ea6 %u8207 %u61c9 %u529b%u3001%u7ff9%u66f2%uff0c%u4ee5%u53ca%u5143%u4ef6%u6027%u80fd%u5bc6%u5207%u76f8%u95dc%uff0c%u96d6%u7136400%u2103%u9375%u5408%u6eab%u5ea6%u7b26%u5408CMOS%u71b1%u9810%u7b97%uff0c%u4f46%u958b%u767c%u66f4%u4f4e%u6eab%u7684%u9375%u5408%u6280%u8853%u4ecd%u7136%u662f%u95dc%u9375%u8ab2%u984c%u3002%u9285%u5c0d%u9285%u9375%u5408%u901a%u5e38%u9700%u8981300~400%u2103%u7684%u9ad8%u6eab%uff0c%u4e3b%u8981%u539f%u56e0%u5728%u65bc%u9285%u8868%u9762%u5b58%u5728%u6c27%u5316%u5c64%uff0c%u9019%u5c64%u6c27%u5316%u7269%u6703%u963b%u7919%u4f86%u81ea%u5169%u500b%u57fa%u677f%u7684%u9285%u539f%u5b50%u7684%u4e92%u76f8%u64f4%u6563%u3002%u56e0%u6b64%uff0c%u5fc5%u9808%u63d0%u4f9b%u8db3%u5920%u9ad8%u7684%u6eab%u5ea6%u4f86%u4fc3%u9032%u9285%u539f%u5b50%u7684%u64f4%u6563%u8207%u6676%u7c92%u6210%u9577%uff0c%u9032%u800c%u5be6%u73fe%u9375%u5408%u3002%u9673%u51a0%u80fd%u6559%u6388%u7684%u7814%u7a76%u5718%u968a%u6210%u529f%u5c55%u793a%u4e86%u4e00%u7a2e%u5229%u7528%u91d1%u5c6c%u920d%u5316%u5c64(Metal passivation layer)%u4f86%u9032%u884c%u4f4e%u6eab%u9285%u5c0d%u9285%u9375%u5408%u7684%u6280%u8853%u3002%u900f%u904e%u5728%u9285%u8868%u9762%u6c89%u7a4d%u4e00%u5c64%u6975%u8584(%u7d0410nm)%u7684%u91d1%u5c6c%u920d%u5316%u5c64%uff0c%u53ef%u4ee5%u6709%u6548%u9632%u6b62%u9285%u6c27%u5316%uff0c%u5982%u571610%u6240%u793a%u3002%u5728%u6b64%u6280%u8853%u4e2d%uff0c%u7576%u4f7f%u7528%u7279%u5b9a%u91d1%u5c6c%u4f5c%u70ba%u920d%u5316%u5c64%u6642%uff0c%u5728%u9375%u5408%u904e%u7a0b%u4e2d%uff0c%u9285%u539f%u5b50%u6703%u50be%u5411%u65bc%u7a7f%u900f%u8a72%u8584%u920d%u5316%u5c64%u7684%u6676%u754c%u64f4%u6563%u4e26%u5230%u9054%u9375%u5408%u4ecb%u9762%u3002%u6b64%u6642%uff0c%u4f86%u81ea%u5169%u500b%u57fa%u677f%u7684%u9285%u539f%u5b50%u56e0%u5c1a%u672a%u53d7%u5230%u6c27%u5316%u5f71%u97ff%uff0c%u56e0%u6b64%u80fd%u5920%u9806%u5229%u5f62%u6210%u9375%u5408%u7d50%u69cb%u3002%u503c%u5f97%u6ce8%u610f%u7684%u662f%uff0c%u9019%u4e00%u73fe%u8c61%u50c5%u767c%u751f%u65bc%u7279%u5b9a%u91d1%u5c6c%uff0c%u5982%u91d1%u3001%u9280%u3001%u9200%u548c%u9226%u7b49%u3002%u6b64%u5916%uff0c%u7814%u7a76%u9084%u986f%u793a%uff0c%u9285%u539f%u5b50%u64f4%u6563%u7684%u9014%u5f91%u4e3b%u8981%u900f%u904e%u920d%u5316%u5c64%u7684%u6676%u754c%uff0c%u800c%u920d%u5316%u5c64%u7684%u539a%u5ea6%u8207%u8868%u9762%u7c97%u7cd9%u5ea6%u662f%u5f71%u97ff%u9375%u5408%u6210%u529f%u8207%u5426%u7684%u95dc%u9375%u56e0%u7d20%u3002%u5728%u6b64%u9285%u5c0d%u9285%u9375%u5408%u7684%u5e73%u53f0%u4e2d%uff0c%u900f%u904e%u9069%u7576%u63a7%u5236%u920d%u5316%u5c64%u7684%u539a%u5ea6%u8207%u8868%u9762%u7c97%u7cd9%u5ea6%uff0c%u5df2%u6210%u529f%u5be6%u73fe%u63a5%u8fd1%u5ba4%u6eab%u768440%u2103%u9375%u5408%u6eab%u5ea6%uff0c%u4e26%u53ef%u900f%u904e%u5f8c%u7e8c%u9000%u706b%u4f86%u589e%u5f37%u9375%u5408%u5f37%u5ea6%u3002%u4e00 %u822c %u800c %u8a00%uff0c%u57fa %u65bc %u91d1 %u5c6c %u920d %u5316 %u7684%u9285%u5c0d%u9285%u9375%u5408%u6280%u8853%u5df2%u5728%u6676%u5713%u5c0d%u6676%u5713(W2W)%u8207%u6676%u7247%u5c0d%u6676%u5713(C2W)%u5169%u7a2e%u898f%u6a21%u4e0a%u6210%u529f%u5c55%u793a%uff0c%u4e14%u9375%u5408%u6eab%u5ea6%u53ef%u4f4e%u65bc150%u2103%u3002%u5982%u571611%u6240%u793a%uff0c%u900f%u904e%u91d1%u5c6c%u920d%u5316%u5c64%u7684Cu/SiO2%u6df7%u5408%u9375%u5408%u6280%u8853%uff0c%u4e0d%u50c5%u5c55%u73fe%u51fa%u5353%u8d8a%u7684%u53ef%u9760%u6027%uff0c%u4ea6%u5177%u5099%u826f%u597d%u7684%u96fb%u6027%u6027%u80fd%u3002%u9664%u4e86%u53ef%u4ee5%u4ee5%u6700%u4f4e%u6eab%u7684%u9375%u5408%u6eab%u5ea6%u5be6%u73fe%u5916%uff0c%u66f4%u91cd%u8981%u7684%u662f%uff0c%u91d1%u5c6c%u920d%u5316%u5c64%u5176%u539f%u7406%u4f86%u81ea%u8868%u9762%u7684 %u91d1 %u5c6c%u8584 %u819c%u4fdd %u8b77%uff0c%u4e26%u672a%u523b%u610f%u6539%u8b8a%u9285%u6750%u6599%u7684%u6676%u7c92%u8207%u6676%u5411%uff0c%u56e0%u6b64%u5728%u61c9%u7528%u4e0a%u5c07%u4e0d%u6703%u53d7%u5230%u5c3a%u5bf8%u5fae%u7e2e%u7684%u9650%u5236%u3002%u672a%u4f86%u8da8%u52e2%u8207%u7d50%u8ad6%u7531%u65bc%u6df7%u5408%u9375%u5408%u901a%u5e38%u8207%u9ad8%u6548%u80fd%u904b%u7b97%u53ca%u9ad8%u983b%u5bec%u8a18%u61b6%u9ad4%u6280%u8853%u7bc0%u9ede%u76f8%u95dc%uff0c%u56e0%u6b64%u5177%u6709%u9ad8%u826f%u7387%u8207%u9ad8%u53ef%u9760%u6027%u7684%u591a%u6676%u7247%u5806%u758a%u5c07%u6210%u70ba%u6a19%u6e96%u9700%u6c42%u3002%u7136%u800c%uff0c%u7531%u65bc%u5806%u758a%u6d89%u53ca%u591a%u500b%u8584%u5316%u6676%u7247%uff0c%u4e14%u6df7%u5408%u9375%u5408%u904e%u7a0b%u4f34%u96a8%u6eab%u5ea6%u5347%u9ad8%uff0c%u6703%u5728%u9375%u5408%u7cfb%u7d71%u4e2d%u7522%u751f%u986f%u8457%u61c9%u529b%u8207%u7ff9%u66f2(warpage)%uff0c%u9032%u800c%u5f71%u97ff%u5f8c%u7e8c%u88fd%u7a0b%u8207%u5c01%u88dd%u3002%u56e0%u6b64%uff0c%u958b%u767c%u4f4e%u6eab%u6df7%u5408%u9375%u5408%u6280%u8853%u662f%u4e00%u500b%u95dc%u9375%u6311%u6230%u3002%u6b64%u5916%uff0c%u9078%u64c7%u9069%u5408%u7684%u6df7%u5408%u9375%u5408%u6750%u6599(%u7279%u5225%u662f%u4ecb%u96fb%u6750%u6599)%u5c0d%u65bc%u6c7a%u5b9a%u9069%u7576%u7684%u9375%u5408%u65b9%u6cd5(%u5982DBI%u6216TCB)%u4e5f%u81f3%u95dc%u91cd%u8981%u3002%u4f8b%u5982%uff0cSiCN%u5df2%u88ab%u6210%u529f%u61c9%u7528%u65bc%u6df7%u5408%u9375%u5408%uff0c%u800c%u5404%u7a2e%u805a%u5408%u7269%u6750%u6599%u4e5f%u88ab%u63d0%u51fa%uff0c%u4ee5%u964d%u4f4e%u9375%u5408%u6eab%u5ea6%u8207%u52a0%u5de5%u6642%u9593%u3002%u6b64%u5916%uff0c%u696d%u754c%u4e5f%u5728%u63a2%u8a0e%u66ff%u4ee3%u9285%u7684%u6750%u6599%uff0c%u4ee5%u5be6%u73fe%u66f4%u4f4e%u6eab%u7684%u9375%u5408%u3002%u6700%u5f8c%uff0c%u4e00%u500b%u7cbe%u5bc6%u7684%u6df7%u5408%u9375%u5408%u8a2d%u5099%u7121%u7591%u662f%u78ba%u4fdd%u6210%u529f%u9375%u5408%u7d50%u679c%u7684%u95dc%u9375%u56e0%u7d20%u3002%u9664%u4e86%u9700%u8981%u9ad8%u5ea6%u7121%u5875%u7684%u9375%u5408%u74b0%u5883%u5916%uff0c%u9375%u5408%u904e%u7a0b%u4e2d%u7684%u8868%u9762%u72c0%u6cc1%u8207%u9846%u7c92%u63a7%u5236%u9ad8%u5ea6%u4f9d%u8cf4%u65bc%u9375%u5408%u8a2d%u5099%u7684%u6027%u80fd%u3002%u6b64%u5916%uff0c%u5c0d%u6e96%u7cbe%u5ea6(alignment accuracy)%u5c0d%u65bc%u571610%uff1a%u91d1%u5c6c%u920d%u5316%u5c64%u4e4b%u9285%u5c0d%u9285%u9375%u5408%u793a%u610f%u5716%u3002 %u571611%uff1aCu/SiO2%u6df7%u5408%u9375%u5408%u8207%u5404%u7a2e%u91d1%u5c6c%u7d14%u5316%u5c64%u3002